Electric Linear Slides

EZS Series for Clean Room Use

Electric Linear Slides EZS Series for Clean Room Use
  • Ball screw drive
  • Equipped with closed loop stepper motor
  • Stroke 50 to 850 mm
  • Compact, highly durable, for clean room use

Tính năng |Electric Linear Slide EZS Series for Clean Room Use

The EZS Series products for clean room use have the same functions and performance as the EZS Series, but are now for clean room use.

Refer to here for details on the EZS Series with a simple dust-resistant structure (not compatible with cleanroom).

For Clean Room Use (ISO Standards Cleanliness Class 3)

With the low dust-generative roller structure and clean grease, the cleanliness class of ISO Standards Class 3* (equivalent to FED Standard Class 1) has been achieved.

  • *About ISO Standards Class 3
  • [ISO Standards Class 3]
    ISO Standards Class 3
  • Air Coupler for Suction

Uses Low Dust-Generative Clean Grease

Low dust-generative clean grease is used on the ball screw, guides, bearing etc.

Uses low dust-generative clean grease

Cleanliness class of Class 3 is Achieved With Minimum Suction

For example, EZSM3 can achieve the cleanliness class of ISO Standards Class 3, with a minimum internal suction volume of approximately 20 ℓ/min.

Uses Low Dust-Generative Clean Grease
  • *For the correlation diagram of particle generation amount and suction volume for EZSM4 and EZSM6, refer to here

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