Electric Linear Slides
EZS Series for Clean Room Use
- Ball screw drive
- Equipped with closed loop stepper motor
- Stroke 50 to 850 mm
- Compact, highly durable, for clean room use
Tính năng |Electric Linear Slide EZS Series for Clean Room Use
The EZS Series products for clean room use have the same functions and performance as the EZS Series, but are now for clean room use.
For Clean Room Use (ISO Standards Cleanliness Class 3)
With the low dust-generative roller structure and clean grease, the cleanliness class of ISO Standards Class 3* (equivalent to FED Standard Class 1) has been achieved.
- *About ISO Standards Class 3
Uses Low Dust-Generative Clean Grease
Low dust-generative clean grease is used on the ball screw, guides, bearing etc.
Cleanliness class of Class 3 is Achieved With Minimum Suction
For example, EZSM3 can achieve the cleanliness class of ISO Standards Class 3, with a minimum internal suction volume of approximately 20 ℓ/min.
- *For the correlation diagram of particle generation amount and suction volume for EZSM4 and EZSM6, refer to here
Related Products
AZ Series Multi-Axis Driver DC Input
You can connect the Oriental Motor AZ Series DC input motors and electric actuators equipped with such motors.
- The slim type is only compatible with EtherCAT. For more details, please contact your nearest branch, sales office, or Customer Support Center.
- *EtherCAT® is registered trademark and patented technology, licensed by Beckhoff Automation GmbH, Germany.
- *MECHATROLINK is a registered trademark of MECHATROLINK Members Association.
- *SSCNETⅢ/H is a registered trademark of Mitsubishi Electric Corporation.
AZ Series mini Driver DC Input
This is a mini driver designed to be more compact and lightweight than a box-style driver. Also compatible with battery power supply, so it can be used for an even wider range of applications than before.
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Technical Data (Table deflection/rigidity)
Combining With Other Manufacturers' Products