Electric Linear Slides

EZS Series

Electric Linear Slides EZS Series
  • Ball screw drive
  • Equipped with closed loop stepper motor
  • Stroke 50 to 850 mm
  • Compact, highly rigid, simple dust-resistant structure

Tính năng |Electric Linear Slides EZS Series

Features of Linear Slide Section

High Rigidity and High Accuracy

Even with the compact motor, a high permissible moment is possible due to the high rigidity of the guide.

  • High Rigidity, High Accuracy Guide

    The guides used on linear slides are LM Guide* made by THK.
    The flat stainless steel guide can tolerate high moments.

    • *Registered trademark of THK Co., Ltd.
    Traveling parallelism 0.03 mm max.
  • Slim Body With Large Transportable Mass

    Slim Body With Large Transportable Mass

High Permissible Moment

A high load moment is achieved from a compact body.

High Permissible Moment
  • *In the case of EZSM6.

Permissible Moment Value in Rolling Direction [N·m]

Model Static Permissible Moment Dynamic Permissible Moment
EZSM3 52.0 10.5
EZSM4 176 27.8
EZSM6 340 55.6

Capable of Driving Heavy Loads at High Speeds

High Speed Driving for Short Distance Regardless of Heavy Load

Can be Installed Even in Small Spaces

This product structure is also suitable when space is limited.

Space Saving
  • Avoidance of Interference With Peripheral Equipment

    The mounting direction of the motor can be changed in 4 directions, allowing the cable outlet direction to be freely changed to suit the installation location.

    Cable outlet direction can be changed
  • Reversed Motor Type to Shorten Overall Length

    The length of the reversed motor type is up to 136.4 mm shorter than the straight type. This contributes to space saving with equipment.

    Reversed Motor Type

Simple Dust-Resistant Structure

The simple dust-resistant structure made from a stainless steel sheet prevents ingress of foreign particles and reduces emission of dust.

Keeps Out Foreign Particles

Simple dust-resistant structure with stainless steel sheet prevents intrusion of foreign particles.

Dust Preventing Structure

The low dust-generative roller structure in the table part rotates against the stainless steel sheet to prevent the generation of particles via friction.

Low dust-generative roller structure

For Clean Room Use (ISO Standards Cleanliness Class 3)

In addition to the low dust-generative roller structure, some products for clean room use achieve the cleanliness class of ISO Standards Class 3 (equivalent to FED Standard Class 1) through the use of low dust-generative clean grease.

Refer to here for details on products for clean room use.

Easy Combination of 2 Axes

Dedicated mounting bracket for easy combination of 2 axes.

  • X-Y Mounting

    XY bracket
    XY bracket application examples
  • X-Z Mounting

    XZ Bracket
    XZ Bracket
  • A dedicated cable holder (sold separately) is also available.
Cable Holders

Advantages of AZ Series Equipped

Battery-Free Absolute Encoder Equipped

It is equipped with a small battery-free mechanical absolute encoder (ABZO sensor). This can help improve productivity and reduce costs.

ABZO sensor
  • Mechanical-Type Sensor
    Retains positioning information even when power is not supplied
  • Multi-Rotation Absolute Encoder
    Absolute position detection is possible with ±900 (1,800) revolutions of the motor shaft from the home position

No External Sensors Required

As it is an absolute system, home sensors or limit sensors are not required.


  • Improved High-Speed Return-to-Home + Return-to-Home Accuracy
  • Reduced Cost
  • Simple Wiring
  • Not Affected by External Sensor Malfunction


Mechanical sensors do not require batteries.
Positioning information is managed mechanically by the ABZO Sensor.


  • No need to replace batteries
  • Unlimited Driver Installation Possibilities
  • Safe for Overseas Shipping

Simplifying the Main Program via Sequence Function

The AZ Series come equipped with a wide variety of sequence functions such as timer settings for linked operation and during operations, conditional branching, and loop operation. (excluding some models)
It can be set up using the support software MEXE02, which simplifies the sequence program of the host system.

  • Positioning Operation Data Setting Value (max. 256)
  • General-Purpose I/O Signal Counts (Input 10, Output 6)
  • Communication I/O Signal Counts (Input 16, Output 16)

Data Collection of Motor Operation Status and Functions Useful for Preventive and Predictive Maintenance

This software is equipped with various monitoring functions for checking the operating status of the motor.
By using different monitors for different situations, it is possible to shorten the start-up and adjustment time of the equipment, as well as to utilize it for maintenance and servicing.

Monitoring Function to Visualize the Motor Operating Status and Help Collect Data

The ABZO sensor bulit in the AZ Series allows you to monitor the motor's operating status numerically.

[Monitoring With MEXE02 Support Software]

Monitoring With MEXE02 Support Software

In addition, the built-in controller type can realize data collection at a host master via industrial network.

Types of network converters and the industrial networks they support

Information Functions Useful for Preventive and Predictive Maintenance

By setting arbitrary numerical values for the monitored information items, external signals can be output when the values are reached.
Importing this information into the host controller helps in early detection of problems and adjustment of product maintenance timing.

Examples of Information Functions

  • TRIP Information

    You can set the number of rotations you want to output in advance, and output when that number is reached. (Motor operation will continue)

    TRIP Information
  • Temperature Information

    You can set the desired output temperature in advance, and the driver will output when it reaches that temperature. (Motor operation will continue)

    Temperature Information

Standardized Wiring, Control, and Maintenance Parts

Various actuator products equipped with the αSTEP AZ Series are available.
They each have the same motor and driver, which allows for standardized wiring, control, and maintenance parts.

Wiring Standardization

The wiring for motor cables, I/O signals, and power supply is the same.

Control Standardization

These products can be operated via the same method, since the control method is the same. For the network control, the remote I/O and the command code are also the same. It saves you the trouble of creating a program.

Unification of Maintenance Parts

Maintenance parts can be minimized, since the motor, driver, and cable are common to all. Management costs (parts cost, management space) can be reduced.

Standardization of Maintenance Parts

AZ Series-Equipped Product Line

Electric Actuators (AZ Series equipped)

Electric Linear Slide Electric cylinder Compact Electric Cylinder Rack-and-Pinion System Electric Gripper Hollow Rotary actuator
EAS Series
EZS Series
EZSH Series
EAC Series DR Series
DRS2 Series
L Series EH Series DGII Series
  • The power supply input of the equipped motor differs between Series. Refer to each Series page for the detailed product line.

Driver Features and Product Line

Drivers That Can be Selected to Match the Host Controller

The lineup is available for a variety of controls, systems, and interfaces.

Driver Type Compatible Interfaces Single Axis Driver
AC Input DC Input
AC Input
DC Input
Network Compatible Drivers are controlled directly from a host control device through industrial network EtherCAT
Built-in Controller Operation data is built into the driver.
Controllable via Modbus (RTU) and I/O. Can be controlled via CC-Link by using a network converter.
Modbus (RTU)
Pulse Input with RS-485 Communication Controlled by pulse signal. Motor status information can be monitored via Modbus (RTU). Pulse input
Modbus (RTU)
Pulse Input Controlled by pulse signal Pulse input
  • *EtherCAT® is registered trademark and patented technology, licensed by Beckhoff Automation GmbH, Germany.
  • *EtherNet/IP™ is a trademark of ODVA.
  • *PROFINET is a trademark or registered trademark of PROFIBUS Nutzerorganisation e.V. (PNO).
  • *MECHATROLINK is a registered trademark of the MECHATROLINK Members Association.
  • *SSCNETⅢ/H is a registered trademark of Mitsubishi Electric Corporation.
  • *CC-Link is a registered trademark of the CC-Link Partner Association.

Support Software, Monitoring Functions

Easy Drive From PC with Support Software MEXE02

By using the support software MEXE02, you can set and edit operation data and various parameters, as well as teach and monitor various conditions.

Click Here to Download the Support Software

Comprehensive Support From Start-up to Maintenance with a Variety of Functions

  • Startup and Evaluation

    Useful functions for wiring check and test operation are provided.

    • Setting and Saving of Operation Data
    • I/O Monitoring
    • Teaching, Remote Operation
  • Adjustment

    The following functions are available to help you adjust motor operation after the equipment is installed.

    • Waveform Monitoring
  • Diagnosis and Maintenance

    Diagnostic and maintenance functions are available for trouble diagnosis and maintenance after operation is started.

    • Alarm Monitoring
    • Unit Information Monitor
    • Status Monitor
  • Operation Data/Parameter Setting Screen
    Operation Data/Parameter Setting Screen
  • Waveform Monitoring
    Waveform Monitoring

Click Here for Details of Support Software Functions

Related Products

Electric Linear Slide EAS Series

It is a compact electric slider with a width of 40 mm and height of 38 mm. The motor section is equipped with AZ series, so it can use the same control method as EZS series.

Click Here for Details


AZ Series Multi-Axis Driver DC Input

You can connect the Oriental Motor AZ Series DC input motors and electric actuators equipped with such motors.

Click Here for Details

network logo
  • 2-Axis Type
    2-Axis Type
  • 3-Axis Type
    3-Axis Type
  • 4-Axis Type
    4-Axis Type
  • Slim Type(2 to 4 axes)
    Slim Type
    (4 axes)
  • *EtherCAT® is registered trademark and patented technology, licensed by Beckhoff Automation GmbH, Germany.
  • *MECHATROLINK is a registered trademark of MECHATROLINK Members Association.
  • *SSCNETⅢ/H is a registered trademark of Mitsubishi Electric Corporation.

AZ Series mini Driver DC Input

This is a mini driver designed to be more compact and lightweight than a box-style driver. Also compatible with battery power supply, so it can be used for an even wider range of applications than before.

Click Here for Details

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αSTEP AZ Series Equipped Electric Linear Slide Electric Cylinder


Operating Manual

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